Title:FAB-Bench: A Framework for Adaptive RAG Benchmarking in Semiconductor Manufacturing

Abstract:Retrieval-Augmented Generation (RAG) has become critical for knowledge-intensive applications, yet evaluating its performance in vertical domains remains difficult due to domain complexity, diverse context scales, and heavy reliance on expert assessments that are costly, inconsistent, and non-scalable. We introduce FAB-Bench, an end-to-end framework for adaptive benchmarking of RAG systems in semiconductor manufacturing. FAB-Bench defines six diagnostic metrics measuring factual accuracy, contextual utilization, completeness, retrieval relevance, technical depth, and reasoning consistency. The framework couples retriever diagnostics with generator-level reasoning analysis across context windows of 4K-32K tokens, quantifying how retrieval precision and generative fidelity co-evolve as contextual scope expands. From over 1,300 generated candidates, we curated a high-quality benchmark of 200 query-answer pairs spanning three synthesis strategies: needle-in-haystack, intra-document multi-topic, and cross-document multi-hop. Systematic evaluation across four LLMs and four RAG frameworks reveals three distinct context-scaling behaviors: logarithmic growth, early saturation, and cold-start dynamics, and identifies attention dilution as the primary mechanism behind performance degradation at extreme context lengths. Cross-framework validation on three additional production RAG systems confirms evaluation portability.

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